Corning Tropel Analytic Instruments Applications
Flatness and form of flat surfaces is critical to a variety of key applications
Corning Tropel Metrology Instruments improve manufacturing capability and yield, increasing our customers’ profitability in a variety of applications:
- Semiconductor Wafers
- Semiconductor Photomasks
- Hydraulic Components
- Diesel Fuel Injection Systems
- Compressors/Pumps
- High-End Rotary Seal Faces
- Hard Disk Drives
- Trace Gas Analysis
- Specialized Ophthalmic Molds
Photomask Applications
- Ground/Polished
- Coated/Uncoated
- Patterned/Pelliclized
- Cassette to Cassette
Pelliclized Photomask Applications
Semiconductor Wafer Applications
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Thin Film Measurements
Stoney's Equation
Stoey's Equation describes the stress in a film deposited on a surface as a function of the change in curvature of the substrate that occurs after the film is deposited.
Specifically:
= the stress in the thin film
= Elastic Modulus for the substrate
= Poisson's Ratio for the substrate
= thickness of the film
= thickness of the substrate
Glass Applications - Thickness and Index Variation
- Measure thickness, TTV, front and back flatness simultaneously
- Extract absolute index and index homogeneity
Tropel FlatMaster MSP Applications
Frequency Stepping Interferometry
- Fast data collection over large vertical dynamic range
- Full surface and multi-surface
- Z-heights to 300mm
Rotary Seal Faces
- Flatness
- Form
- Depth
- Full surface
- Sub-micron
- Stitchin/automation for large surfaces
Fuel Cells
- Analyze flow field and measure sealing surface flatness at the same time in just seconds!
- Metals, polymers, ceramics, glass and more
- Surface finishes from ground to polished
Typical Industrial Applications
- Mechanical Seals
- Fuel Injectors
- Precision Pumps
- Hydraulics
- Ceramics
- Flat Disks
